FAB Services Annealing and Oxidation

Annealing and Oxidation

Rapid Thermal Annealing (RTA) is available for most annealing applications. An oxidation system is used specifically for wet oxidation of VCSEL devices. With in-situ monitoring of the oxidation front, there is no need for calibration.

Available systems are:
  • Polyimide Oven
  • Modular Process RTA (max 1200¢XC)
  • March Asher (Model PX500)
  • Vacuum Oven for HMDS vapor priming
  • VCSEL Oxidation with in-situ monitoring

OEpic's Annealing and Oxidation

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