Annealing and Oxidation

Rapid Thermal Annealing (RTA) is available for most annealing applications. An oxidation system is used specifically for wet oxidation of VCSEL devices. With in-situ monitoring of the oxidation front, there is no need for calibration.

Available systems are: Polyimide Oven Modular Process RTA (max 1200¢XC) March Asher (Model PX500) Vacuum Oven for HMDS vapor priming VCSEL Oxidation with in-situ monitoring