Annealing and Oxidation
Rapid Thermal Annealing (RTA) is available for most annealing applications.
An oxidation system is used specifically for wet oxidation of VCSEL devices.
With in-situ monitoring of the oxidation front, there is no need for calibration.
Available systems are:
- Polyimide Oven
- Modular Process RTA (max 1200¢XC)
- March Asher (Model PX500)
- Vacuum Oven for HMDS vapor priming
- VCSEL Oxidation with in-situ monitoring