FAB Services E-beam Direct Lithography  

E-beam Direct Lithography

(Temporarily Unavailable)


Our Cambridge EBMF 10.5 E-Beam Lithography System accepts wafers up to 4-inch in diameter and writes with a spot size of 100nm


Applications
  • DFB grating
  • HEMT mushroom gate
OEpic's Ebeam
 


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