FAB Services Evaporation, Sputtering and Plating

Evaporation, Sputtering and Plating


Metal deposition is done either by our Temescal E-Beam Evaporator, or by our TFE Sputtering System. Available metals include: Au, Pt, Ti, Ni, Ag, Cr, Ge, Al. Thick gold plating is done in our wafer electroplating station. We perform silicon oxide, silicon nitride and oxynitride deposition by PECVD.

OEpic's Evaporation, Sputtering and Plating
 


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