Quality assurance at wafer growth stage is taken care of by
material characterization tools.
Electrical measurement of process control monitors (PCMs)
ensure compliance of key processing steps.
In addition, the following tools are available for wafer inspection and quantification of etch steps, film thicknesses,
- Hitachi S-4500 SEM
- Ambios Surface Scan
- Rudolph Ellipsometer
- Nanometrics NanoSpec/AFT